Heterogeneous photonic integration of single-crystalline nanomembranes

Nature, Published online: 16 September 2026; doi:10.1038/s41586-026-11000-wA framework consisting of advanced epitaxy and layer lift-off techniques uses heterogeneous photonic integration of single-crystalline nanomembranes to infuse d…

Nature, Published online: 16 September 2026; doi:10.1038/s41586-026-11000-w

A framework consisting of advanced epitaxy and layer lift-off techniques uses heterogeneous photonic integration of single-crystalline nanomembranes to infuse desired functionalities into silicon and silicon nitride photonics, demonstrating ultraefficient electro-optical and magneto-optical modulation.